Prime Wafers

 

Diameter 2, 3, 4 inch (Other dimensions upon request)
Grade

Production

Research

Dummy

Thickness 330-430 um (depends on diameter)
Orientation

On axis: <0001> ± 0.5 deg

Off axis: 1.0/3.5/4.0/8.0 towards <11-20> ± 0.5 deg

Resistivity

4H-N: 0.01-0.03 (ohm-cm)

6H-N: 0.02-0.1(ohm-cm)

6H-SI >1E5 (ohm-cm)

Roughness

Polish: Ra<1nm;

CMP: Ra<0.5nm

Services

Please check our Service page
Remarks Other specs (orientation, thickness, etc) are possible
   

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